| 品牌 | 昊量光電 | 價(jià)格區(qū)間 | 面議 |
|---|---|---|---|
| 產(chǎn)地類別 | 國(guó)產(chǎn) | 應(yīng)用領(lǐng)域 | 電子/電池,汽車及零部件,綜合 |
非接觸式方阻成像儀EddyCus TF Map
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)。該設(shè)備配備了一個(gè)運(yùn)動(dòng)的渦流傳感器，每次掃描可測(cè)量高達(dá)90000 (300 x 300)測(cè)量點(diǎn)的方塊電阻。由于這種技術(shù)不需要與標(biāo)本進(jìn)行物理接觸，該設(shè)備可以在飛行運(yùn)動(dòng)中進(jìn)行測(cè)量。此外，非接觸式單點(diǎn)方阻測(cè)試儀具有很高的準(zhǔn)確性，因?yàn)樗仟?dú)立于任何接觸質(zhì)量。非接觸式薄膜方塊電阻測(cè)量?jī)x樣品中測(cè)量點(diǎn)的高密度確保了沒(méi)有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實(shí)驗(yàn)室中各種薄膜的系統(tǒng)質(zhì)量保證。
非接觸式方阻成像儀EddyCus TF Map主要測(cè)試對(duì)象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品
非接觸式方阻成像儀的規(guī)格：
| Measurement technology | Non-contact eddy current sensor |
| substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5" x 19.1" x 33.5" / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.5% | < 1% | < 0.5% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance | |||||
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